communication antenna, plasma etching, and high power use. ... Radial line; Slot antenna; Circular polarization; Linear polarization; Direct broadcast satellite; ... Characteristics of large-diameter plasma using a radial-line slot antenna Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and ... Design of a Concentric Array Radial Line Slot Antenna for High-Power ... Jan 27, 2015 ... A compact concentric array radial line slot antenna (CA-RLSA) operating at ... Published in: IEEE Transactions on Plasma Science ( Volume: 43 ... Design of a Concentric Array Radial Line Slot Antenna for ... - NSFC
The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window. The plasma is typically comprised of inert gases like argon and mixtures of halogen or fluorocarbon gases for etching.
A slot antenna consists of a metal surface, usually a flat plate, with one or more holes or slots ... Slot antennas are often used at UHF and microwave frequencies instead of line antennas when greater control of the radiation pattern is required. ... Plasma antenna · Quad antenna · Reflective array antenna · Regenerative loop ... Radial Line Slot Antennas - Springer communication antenna, plasma etching, and high power use. ... Radial line; Slot antenna; Circular polarization; Linear polarization; Direct broadcast satellite; ... Characteristics of large-diameter plasma using a radial-line slot antenna
Because it radiates only into the space above the ground plane, or half the space of a dipole antenna, a monopole antenna will have a gain of twice (3 dB greater than) the gain of a similar dipole antenna, and a radiation resistance half …
A Model for Antenna-Plasma Wave Co upling towards Control of Uniformity in Slot-Excited Microwave Discharges Daichi SAWADA, Akihiro TSUJI, Takanori KITSUDO, Yasuyoshi YASAKA, and Hiromasa TAKENO Department of Electrical and Electronic Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan
Computational modeling study of the radial line slot
US3668459A - Coupled cavity slow wave circuit and tube using… Each axially aligned array of coupling slots includes means for interrupting the flow of electrons through the slots such as a blocking member or the slots are staggered or offset in radial or angular position such as to block off a line-of …
APS -66th Annual Gaseous Electronics Conference - Event ...
Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and ... Design of a Concentric Array Radial Line Slot Antenna for High-Power ... Jan 27, 2015 ... A compact concentric array radial line slot antenna (CA-RLSA) operating at ... Published in: IEEE Transactions on Plasma Science ( Volume: 43 ... Design of a Concentric Array Radial Line Slot Antenna for ... - NSFC IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 43, NO. 10, OCTOBER 2015. 3527. Design of a Concentric Array Radial Line Slot. Antenna for High- Power ... Design of Radial Line Slot Antennas at 8.3 GHz for Large ... - IOPscience
Design of Radial Line Slot Antennas at 8.3 GHz for Large ... Design of Radial Line Slot Antennas at 8.3 GHz for Large ... Simulation of microwave pulsing in a radial line slot ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna. Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure.